Лампа обогрева TEL (Tokyo Electron)

Mon, 08 Jun 2026 05:22:51 +0800

Out on the lithography floor, you know how it goes. A soft bake that’s off by even a fraction of a degree can show up as linewidth variation—and that’s yield walking out the door. You need heat that hits the process card spec, exactly, every single run. TEL heater lamps are built to deliver that consistency.

What matters under the hood

We built the lamp around short-wave infrared, using a halogen element inside a quartz envelope. That gives you rapid, directional energy transfer. The payoff is a sub-millimeter thermal field that hits wafer-level uniformity within tight tolerances, and repeatability that keeps photoresist bake profiles stable, run after run. The temperature control is tight enough to protect thermal budget on advanced nodes, and the response time keeps pace with high-throughput sequences. Cleanroom compatibility isn’t an afterthought, either—materials and construction keep particle generation low and output stable, even when you’re running 24/7.

Электрон) on Premium Infrared Heat Ace

Лампа обогрева TEL (Tokyo Electron)

What matters under the hood