Semiconductor sputtering heater

Tue, 30 Jun 2026 13:05:45 +0800

On the fab floor, thermal excursions aren’t just deviations—they’re yield killers. A sputtering chamber that drifts even a hair off target adds film stress and thickness non-uniformity, and that carries straight into lithography and etch. We built our infrared sputtering heaters to take that uncertainty off the table, locking deposition stability right where it counts: at the wafer surface. Our short-wave infrared design hits the wafer with fast, direct-coupled heat and keeps wafer-level uniformity within ±0.1°C. The quartz radiator geometry and closed-loop control hold the thermal budget tight, so you land on target thickness without overshoot. In photoresist processing, that same infrared profile gives you repeatable solvent removal in pre-bake and a clean, consistent hard bake—fewer footing and scum issues that come back as CD errors later. It’s cleanroom-ready by design. The heater body runs particle-free in Class 1–100, and the low-outgassing materials keep contamination out during long sputter runs. Zero particle generation at the wafer edge means fewer rejects and maintenance you can plan around. You end up with stable cycle times, lower energy per wafer, and film properties that stay consistent across lots. Installation is straightforward on most sputter platforms, but the compact footprint does tighten up clearance around shields and fixtures. Plan the integration early—match the mounting interface and confirm optical path clearance before you do the line changeover. Once it’s in, the system runs 24/7 with minimal drift, and the repeatability you see on the datasheet shows up in-line, in metrology, staying within spec lot after lot.

Sputtering on Premium Infrared Heat Ace

Semiconductor sputtering heater